By utilizing the modern IC/MEMS foundries’ fabrication technologies, Crizotinib ALK it will be much efficient to maximize the sensors’ uniformity and minimize the product selleck compound cost. Researchers have made efforts in developing sensors with combined functions [9�C11]. However, the huge diversities in sensing objects (inertial, electromagnetic, thermal, etc.), principles (piezoresistive, capacitive, resonant, etc.), and applications (auto-electronics, environmental monitoring, etc.), have imposed great challenges in commercializing integrated composite sensor products. In addition, Inhibitors,Modulators,Libraries several developed integration techniques utilized double-sided micromachining process [12] and even silicon-on-insulator Inhibitors,Modulators,Libraries (SOI) wafers [13], which are not favorable for low-cost mass production for sensing networks.
Thus, a design/fabrication platform module with low-cost integrated-process solutions is Inhibitors,Modulators,Libraries highly desirable.In this paper, we propose a monolithic low-cost design/fabrication module with a single-sided ��low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al�� process on conventional substrates. The versatile SiN/poly-Si/Al Inhibitors,Modulators,Libraries layers realize diverse sensing functions. A ��pressure + acceleration + temperature + infrared�� (PATIR) prototype chip for sensing node applications is demonstrated. In the platform module, diverse sensing structure designs are monolithically integrated by a compatible process in which the fabrication steps and materials are shared.
More importantly, Inhibitors,Modulators,Libraries the proposed design/fabrication module concept will lead to a low-cost single-chip-integrated ��function library��, as a customizable tool for the customers.
Users may activate or de-activate these functions Inhibitors,Modulators,Libraries using a hybrid-packaged circuit chip. As a result, it will remarkably save the design/fabrication/packaging Inhibitors,Modulators,Libraries costs for Inhibitors,Modulators,Libraries versatile multifunctional sensing-network nodes. This paper is organized as follows: Section 2 describes the proposed design strategy for the composite sensor. Section 3 presents the structure and parameter GSK-3 design of the prototype PATIR sensor. Section 4 depicts the developed single-sided low-cost fabrication module. Section 5 shows the measurement results of the PATIR sensor, followed by the conclusions in Section 6.2.
?Design Strategy for Monolithic Composite SensorTo form a low-cost design/fabrication Batimastat platform module for a multifunctional composite sensor, the device structure, material and fabrication method should be comprehensively considered and selected.
The objective single-chip-integrated ��function library�� will contain different sensing components with various structure types and shared materials. The key is to develop a low-cost, highly compatible find protocol process module selleck chem for versatile structure and material design.2.1. Structure Compatibility DesignWe may divide the common sensor structures into four essential categories, including the basic type, suspended type, chamber type and beam type, as shown in Figure 1.